MX-80(大金相r)

MX-80(大金相r) 

 

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向上 BXFM/BXFM-SX半套金相 U-OSM MICROMETER微分器 MX61/61L大金相 BX2M-CFU GX51/71倒立顯微鏡 MX-80(大金相r) SZX10/16實體顯微鏡 OLS-4000 LEXT 雷射顯微鏡 SZ61/SZ51實體顯微鏡 LIGHT 光源 OBJECTIVE 物鏡 工具顯微鏡(Tool micro.) 光學名詞註解

Inspection Microscope (MX80)
 
Item Descriptions
Observation tube Super widefield erect image tilting trinocular tube(U-SWETTR)Optical path changeover(100:0/20:80), tilting angle 2 to 35 degreesF.N. 26.5Optical axis—eye point approx. 300mm (horizontal)
Super widefield erect image tilting trinocular tube for motorized stage used(MX-SWETTR300)Optical path changeover(100:0/20:80), tilting angle 0 to 45 degreeintegrated 1/2.5x variable magnification functionF.N. 26.5Optical axis---eye point approx. 500mm (horizontal)
Revolving nosepiece 6-position motorized BF/DF revolving nosepiece (integrated center motor)
6-position motorized BF/DF/DIC revolving nosepiece(integrated center motor and DIC prisms)motorized DIC prism switching (observation mode, interlocked with objective)built-in prism: 2 types for UM objective and LM objective (for ultra high magnification)motorized DIC retardation changing
Reflected light illumination Illumination(integrated)system Motorized selection of observation modes(4-cube turret selection for BF, DF, DIC, POL and FL)AS 6-stage turret interlocked with objective/Automatic FS opening in DF(fixed size of FS), Motorized analyzer mounting/dismounting(for DIC combined with auto focus)Light source: 12V100W halogen(the intensity adjustment can be preset by objective in use), 100W Hg, 75W XeFilter pocket(ø25mm, up to 3 filters can be accommodated. Manual switching)built-in DND(manual switching)
AF(integrated)system Laser active method, wavelength λ=780nm, CDRH class 1 compatiblemagnification 5X-250Xoffset functionapplicable sample reflectance 3%-100%(other value for 250X objective)repeatability ±0.2μm(=150X objective)focus tracking range 10,000μm-15μm(2,000μm for 20X objective)the exclusive DF/DIC mirror units are used for AF combination
Transmitted illumination(option) condenser: N.A. 0.6/W.D. 30mm(t=9mm mask thickness can be observed)field diaphragm, condenser height adjustablethe separate light source(LG-PS2* 12V100W halogen lamp) and a fiber guide(LG-SF*) are required
Microscope stand Compatible frame for 200/300mm wafer inspectionAn RS232C communication external interface, microscope stand power switch
Motorized focusing unitVertical stroke 25mm, Z-direction resolution, 50nm(with 50X or higher magnification objective)Focusing speed interlocked with objective, focusing adjustment for each objective, high limit, stage lowering(return)
Main operation unit 2-jog 11-button main hand switches7-segment LED display
Focusing handle unit 1 focus knob 5 button focus handle unit(auxiliary operation unit)
Power supply 12V 100W light source, power box for motorized control(separately mounted)
Stage MX-SIC8R XY stroke: (X) 210m x (Y) 210mmAL110-VS8(for 200mm/150mm wafer handler the model AL110)MX-SIC1412 XY stroke: (X) 355.6mm x (Y) 304.8mmAccommodates various kinds of motorized stages from other suppliers(assist spring is needed for a stage of 10kg or over)
Objective UIS objectives(objective adapter combined for brightfield objective)
Eyepiece UIS eyepieces(F.N. 26.5)
Power consumption 100-240V ±10%, ~4.8A, 50/60Hz
Weight Microscope stand including AF illumination tube: 53kgApproximately 73 kg when combined with standard modules(6-hole motorized DIC revolving nosepiece, U-SWETTR, MX-SIC8R)

鼎晶科技/Tomas ATG/TTG百輝/溫澤 BRILLANT 3D製造商(德國授權) (昆山 /東莞 立偉國際 )

電話:

0925-622-111   Google+

郵寄地址:

高雄市三民區水源路十六號五樓

客戶服務: cnc@hi-top.com.tw

Micr

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